Facilities
Chemical Vapor Deposition
RF Magnetron Sputter
Thermal Evaporator
Furnace
Rapid Thermal Annealing System
Vacuum Annealing System
Vaccum Oven
Di-Water System
Fume Hood 1, 2
Solvent Storage
Chemical Tables
Reactive Ion Etcher
Manyfold Gas/Vacuum System
Anodic Aluminum Oxide (AAO)
Metal Sputter
